Titanium nitride: Difference between revisions

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Because of TiN's metallic gold color, it is used to coat [[costume jewelry]] and automotive trim for decorative purposes. TiN is also widely used as a top-layer coating, usually with [[nickel]] (Ni) or [[chromium]] (Cr) plated substrates, on consumer plumbing fixtures and door hardware. As a coating it is used in [[aerospace]] and military applications and to protect the sliding surfaces of [[suspension (vehicle)|suspension]] forks of [[bicycle]]s and [[motorcycle]]s as well as the shock shafts of [[radio controlled car]]s. TiN is also used as a protective coating on the moving parts of many rifles and semi automatic firearms, as it is extremely durable. It is also used as a coating on compression driver diaphragms to reduce high frequency resonance of pure titanium. As well as being durable, it is also extremely smooth, making removing the carbon build up extremely easy. TiN is non-toxic, meets [[Food and Drug Administration|FDA]] guidelines and has seen use in [[medical device]]s such as [[scalpel]] blades and orthopedic [[Bone cutter|bone saw]] blades where sharpness and edge retention are important.<ref>{{cite web |title=Products |publisher=IonFusion Surgical |url=http://www.ionfusion.com |access-date=2009-06-25}}</ref> TiN coatings have also been used in implanted [[prosthesis|prostheses]] (especially [[hip replacement]] implants) and other medical implants.
 
Though less visible, [[thin film]]s of TiN are also used in [[microelectronics]], where they serve as a [[electrical conductivity|conductive]] connection between the active device and the metal contacts used to operate the circuit, while acting as a [[diffusion barrier]] to block the [[diffusion]] of the metal into the silicon. In this context, TiN is classified as a "barrier metal" (electrical resistivity ~ 25 µΩ·cm<ref name=th2/>), even though it is clearly a [[ceramic]] from the perspective of [[chemistry]] or mechanical behavior. Recent chip design in the 45&nbsp;nm technology and beyond also makes use of TiN as a "metal" for improved [[transistor]] performance. In combination with [[gate dielectric]]s (e.g. HfSiO) that have a higher [[permittivity]] compared to standard [[Silicon dioxide|SiO<sub>2</sub>]] the gate length can be scaled down with low [[Subthreshold leakage|leakage]], higher drive current and the same or better [[threshold voltage]].<ref>{{cite journal |first1=Thaddeus G. |last1=Dziura |first2=Benjamin |last2=Bunday |first3=Casey |last3=Smith |first4=Muhammad M. |last4=Hussain |first5=Rusty |last5=Harris |first6=Xiafang |last6=Zhang |first7=Jimmy M. |last7=Price |year=2008 |title=Measurement of high-k and metal film thickness on FinFET sidewalls using scatterometry |journal=Proceedings of SPIE |volume=6922 |issue=2 |page=69220V |doi=10.1117/12.773593 |series=Metrology, Inspection, and Process Control for Microlithography XXII |bibcode=2008SPIE.6922E..0VD |s2cid=120728898}}</ref> Additionally, TiN thin films are currently under consideration for coating [[zirconium alloy]]s for [[accident-tolerant fuel|accident-tolerant nuclear fuels]].<ref>{{Cite journal |last1=Tunes |first1=Matheus A. |last2=da&nbsp;Silva |first2=Felipe C. |last3=Camara |first3=Osmane |last4=Schön |first4=Claudio G. |last5=Sagás |first5=Julio C. |last6=Fontana |first6=Luis C. |last7=Donnelly |first7=Stephen E. |last8=Greaves |first8=Graeme |last9=Edmondson |first9=Philip D. |display-authors=6 |date=December 2018 |title=Energetic particle irradiation study of TiN coatings: are these films appropriate for accident tolerant fuels? |journal=Journal of Nuclear Materials |volume=512 |pages=239–245 |doi=10.1016/j.jnucmat.2018.10.013 |bibcode=2018JNuM..512..239T |url=https://pure.hud.ac.uk/ws/files/14781227/preprint_TiN.pdf}}</ref><ref>{{Cite journal |last1=Alat |first1=Ece |last2=Motta |first2=Arthur T. |last3=Comstock |first3=Robert J. |last4=Partezana |first4=Jonna M. |last5=Wolfe |first5=Douglas E. |date=September 2016 |title=Multilayer (TiN, TiAlN) ceramic coatings for nuclear fuel cladding |journal=Journal of Nuclear Materials |volume=478 |pages=236–244 |doi=10.1016/j.jnucmat.2016.05.021 |doi-access=free |bibcode=2016JNuM..478..236A}}</ref>